Micro-triboelectric generator for zero-power shock detection

This work shows zero-power shock sensing for the combination of a micro-triboelectric generator and MEMS electrostatic actuator system where mechanical to causes it produce voltage, this voltage is used actuate Micro-Electro-Mechanical-system (MEMS) switch. For first time, we present fabrication process Triboelectric-Nano-Generator (TENG) with technology. The MEMS-TENG has suspended 1.5 mm × plate separated by 2 μm from substrate. triboelectric transducer made Al micro-plate above polyimide (PI) thin layer that covered another in back. In case sufficiently strong, hits its As result impact, electrification happens PI gets negatively charged, while positively charged. Connecting switch, use generated TENG was able supply difference up 0.4 V at 2.3g. We cantilevered switch (500 20 μm) gap fixed bottom electrode. Triboelectric generators are known high voltages low currents, which makes them ideal integration devices require ultra-low power operate. Our feasibility study opens doors billions innovative can be created synergistic combination.